SECS/GEM和GEM300作为SEMI标准的一部分，分别是针对200毫米和300毫米晶圆制造的标准规范。特别是GEM300这标准协议，涉及到自动化加工，是FAB厂必不可少的东西。
SECS/GEM标准主要包含协议：E4、E5、E30、E37
300毫米标准GEM300包含标准：E4、E5、E30、E37、E39、E40、E87、E90、E94、E116
近俩年12寸的晶圆厂建设比例逐年上升，国内对12寸的设备需求度越来越多，然而12寸设备必须要支持GEM300标准。
半导体设备要想支持GEM300标准存在一些挑战。特别是没有做过300mm晶圆设备的开发或者做过GEM300，与现有SECS/GEM标准相比，300mm标准困难度提高许多。
经过十多年发展，国内SECS/GEM和GEM300也已经跟国际的效果做到一样了。
作为代表性的SECS/GEM和GEM300， 金南瓜的GEM300及其GEM200备受瞩目。
金南瓜GEM300基于GEM200基础之上，增加了对300mm制程场景的支持。GEM200的设备无需做任何修改基础，只需增加GEM300的处理，完美SEMI E30、E39、E40、E87、E90、E94等多项标准，内部集成管理Carrier、Substrate、Control Job、Process Job等对象。
Stream Function Message Name Description
Sx F0 Abort Transaction H <--> E
S1 F1 Are You There Request H <--> E
S1 F2 On Line Data H <--> E
S1 F3 Selected Equipment Status Request H --> E
S1 F4 Selected Equipment Status Data H <-- E
S1 F11 Status Variable Namelist Request H --> E
S1 F12 Status Variable Namelist Reply H <-- E
S1 F13 Establish Communications Request H <--> E
S1 F14 Establish Communications Request Acknowledge H <--> E
S1 F15 Request OFF-LINE H --> E
S1 F16 OFF-LINE Acknowledge H <-- E
S1 F17 Request ON-LINE H --> E
S1 F18 ON-LINE Acknowledge H <-- E
S1 F21 Data Variable Namelist Request H --> E
S1 F22 Data Variable Namelist H <-- E
S1 F23 Collection Event Namelist Request H --> E
S1 F24 Collection Event Namelist H <-- E
S2 F13 Equipment Constant Request H --> E
S2 F14 Equipment Constant Data H <-- E
S2 F15 New Equipment Constant Send H --> E
S2 F16 New Equipment Constant Acknowledge H <-- E
S2 F17 Date and Time Request H --> E
S2 F18 Date and Time Data H <-- E
S2 F23 Trace Initialize Send H --> E
S2 F24 Trace Initialize Acknowledge H <-- E
S2 F29 Equipment Constant Namelist Request H --> E
S2 F30 Equipment Constant Namelist H <-- E
S2 F31 Date and Time Set Request H --> E
S2 F32 Date and Time Set Acknowledge H <-- E
S2 F33 Define Report H --> E
S2 F34 Define Report Acknowledge H <-- E
S2 F35 Link Event Report H --> E
S2 F36 Link Event Report Acknowledge H <-- E
S2 F37 Enable/Disable Event Report H --> E
S2 F38 Enable/Disable Event Report Acknowledge H <-- E
S2 F41 Host Command Send H --> E
S2 F42 Host Command Acknowledge H <-- E
S5 F1 Alarm Report Send H <-- E
S5 F2 Alarm Report Acknowledge H --> E
S5 F3 Enable/Disable Alarm Send H --> E
S5 F4 Enable/Disable Alarm Acknowledge H <-- E
S5 F5 List Alarms Request H --> E
S5 F6 List Alarm Data H <-- E
S5 F7 List Enabled Alarm Request H --> E
S5 F8 List Enabled Alarm Data H <-- E
S6 F1 Trace Data Send H <-- E
S6 F2 Trace Data Acknowledge H --> E
S6 F11 Event Report Send H <-- E
S6 F12 Event Report Acknowledge H --> E
S6 F13 Annotated Event Report Send H <-- E
S6 F14 Annotated Event Report Acknowledge H --> E
S6 F15 Event Report Request H --> E
S6 F16 Event Report Data H <-- E
S6 F17 Annotated Event Report Request H --> E
S6 F18 Annotated Event Report Data H <-- E
S6 F19 Individual Report Request H --> E
S6 F20 Individual Report Data H <-- E
S6 F21 Annotated Individual Report Request H --> E
S6 F22 Annotated Individual Report Data H <-- E
S7 F1 Process Program Load Inquire H <--> E
S7 F2 Process Program Load Grant H <--> E
S7 F3 Process Program Send H <--> E
S7 F4 Process Program Acknowledge H <--> E
S7 F5 Process Program Request H <--> E
S7 F6 Process Program Data H <--> E
S7 F17 Delete Process Program Send H --> E
S7 F18 Delete Process Program Acknowledge H <-- E
S7 F19 Current EPPD Request H --> E
S7 F20 Current EPPD Data H <-- E
S9 F1 Unrecognized Device ID H <-- E
S9 F3 Unrecognized Stream Type H <-- E
S9 F5 Unrecognized Function Type H <-- E
S9 F7 Illegal Data H <-- E
S9 F9 Transaction Timer Timeout H <-- E
S9 F11 Data Too Long H <-- E
S9 F13 Conversation Timeout H <-- E
S10 F1 Terminal Request Acknowledge H <-- E
S10 F2 Terminal Request Acknowledge H --> E
S10 F3 Terminal Display, Single H --> E
S10 F4 Terminal Display, Single Acknowledge H <-- E